| Title |
|
|
|
Sputter deposition of thin films in a dual-magnetron device : a multi-species Monte Carlo model
| |
| Author |
|
|
|
| |
| Abstract |
|
|
| | |
| Language |
|
|
|
English
| |
| Source (journal) |
|
|
|
New journal of physics / Institute of Physics [Londen]; German Physical Society. - Bristol | |
| Publication |
|
|
|
Bristol : 2012
| |
| ISSN |
|
|
|
1367-2630
| |
| Volume/pages |
|
|
|
14:7(2012), 21 p.
| |
| Article Reference |
|
|
|
073043
| |
| ISI |
|
|
|
000307072500003
| |
| Medium |
|
|
|
E-only publicatie
| |
| Full text (Publisher's DOI) |
|
|
| | |
| Full text (open access) |
|
|
| | |
|