Publication
Title
Sputter deposition of thin films in a dual-magnetron device : a multi-species Monte Carlo model
Author
Abstract
Language
English
Source (journal)
New journal of physics / Institute of Physics [Londen]; German Physical Society. - Bristol
Publication
Bristol : 2012
ISSN
1367-2630
Volume/pages
14:7(2012), 21 p.
Article Reference
073043
ISI
000307072500003
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 23.07.2012
Last edited 31.10.2018
To cite this reference