Title |
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Sputter deposition of thin films in a dual-magnetron device : a multi-species Monte Carlo model
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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New journal of physics / Institute of Physics [Londen]; German Physical Society. - Bristol | |
Publication |
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Bristol : 2012
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ISSN |
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1367-2630
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Volume/pages |
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14:7(2012), 21 p.
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Article Reference |
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073043
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ISI |
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000307072500003
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Medium |
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E-only publicatie
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Full text (Publisher's DOI) |
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Full text (open access) |
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