Publication
Title
Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas
Author
Abstract
Language
English
Publication
2012
Volume/pages
101:11(2012), 4 p.
Article Reference
114101
ISI
000309329300094
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 12.09.2012
Last edited 24.10.2018
To cite this reference