Title
Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Bristol ,
Subject
Physics
Engineering sciences. Technology
Source (journal)
Nanotechnology. - Bristol
Volume/pages
23(2012) :30 , 8 p.
ISSN
0957-4484
Article Reference
305707
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
The fabrication and integration of low-resistance carbon nanotubes (CNTs) for interconnects in future integrated circuits requires characterization techniques providing structural and electrical information at the nanometer scale. In this paper we present a slice-and-view approach based on electrical atomic force microscopy. Material removal achieved by successive scanning using doped ultra-sharp full-diamond probes, manufactured in-house, enables us to acquire two-dimensional (2D) resistance maps originating from different depths (equivalently different CNT lengths) on CNT-based interconnects. Stacking and interpolating these 2D resistance maps results in a three-dimensional (3D) representation (tomogram). This allows insight from a structural (e.g. size, density, distribution, straightness) and electrical point of view simultaneously. By extracting the resistance evolution over the length of an individual CNT we derive quantitative information about the resistivity and the contact resistance between the CNT and bottom electrode.
E-info
https://repository.uantwerpen.be/docman/iruaauth/f1f637/2cd2484.pdf
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