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Title
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Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas
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Author
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Abstract
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| Both geometrical and electrical asymmetry effects in capacitive argon discharges are investigated using a two-dimensional particle-in-cell coupled with Monte Carlo collision model. When changing the ratio of the top and bottom electrode surface areas and the phase shift between the two applied harmonics, the induced self-bias was found to develop separately. By adjusting the ratio between the high and low harmonic amplitudes, the electrical asymmetry effect at a fixed phase shift can be substantially optimized. However, the self-bias caused by the geometrical asymmetry hardly changed. Moreover, the separate control of these two asymmetry effects can also be demonstrated from their power absorption profiles. Both the axial and radial plasma density distributions can be modulated by the electrical asymmetry effect. |
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Language
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English
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Source (journal)
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Journal of physics: D: applied physics. - London
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Publication
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London
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2012
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ISSN
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0022-3727
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DOI
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10.1088/0022-3727/45/30/305203
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Volume/pages
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45
:30
(2012)
, 8 p.
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Article Reference
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305203
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ISI
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000306475200007
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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