Publication
Title
Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas
Author
Abstract
Language
English
Source (journal)
Journal of physics: D: applied physics. - London
Publication
London : 2012
ISSN
0022-3727
Volume/pages
45:30(2012), 8 p.
Article Reference
305203
ISI
000306475200007
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 13.09.2012
Last edited 18.12.2018
To cite this reference