Title
Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
London ,
Subject
Physics
Source (journal)
Journal of physics: D: applied physics. - London
Volume/pages
45(2012) :30 , 8 p.
ISSN
0022-3727
Article Reference
305203
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
Both geometrical and electrical asymmetry effects in capacitive argon discharges are investigated using a two-dimensional particle-in-cell coupled with Monte Carlo collision model. When changing the ratio of the top and bottom electrode surface areas and the phase shift between the two applied harmonics, the induced self-bias was found to develop separately. By adjusting the ratio between the high and low harmonic amplitudes, the electrical asymmetry effect at a fixed phase shift can be substantially optimized. However, the self-bias caused by the geometrical asymmetry hardly changed. Moreover, the separate control of these two asymmetry effects can also be demonstrated from their power absorption profiles. Both the axial and radial plasma density distributions can be modulated by the electrical asymmetry effect.
E-info
https://repository.uantwerpen.be/docman/iruaauth/22c241/4a12485.pdf
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