Title
Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Bristol :IOP publishing ,
Subject
Physics
Source (journal)
Chinese Physics B / Chinese physical society. - Bristol
Volume/pages
21(2012) :7 , 6 p.
ISSN
1674-1056
1674-1056
Article Reference
075203
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.
E-info
https://repository.uantwerpen.be/docman/iruaauth/625b2e/ea02602.pdf
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