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Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
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| Abstract |
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| A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure. | |
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English
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| Source (journal) |
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Chinese Physics B / Chinese physical society. - Bristol |
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| Publication |
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Bristol : IOP publishing, 2012
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| ISSN |
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1674-1056
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| Volume/pages |
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21:7(2012), 6 p.
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| Article Reference |
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075203
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| ISI |
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000306558300058
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E-only publicatie
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| Full text (publisher's version - intranet only) |
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