| Title |
|
|
|
Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
|
|
| Author |
|
|
|
|
|
| Abstract |
|
|
|
| A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure. | |
|
| Language |
|
|
|
English
|
|
| Source (journal) |
|
|
|
Chinese Physics B / Chinese physical society. - Bristol |
|
| Publication |
|
|
|
Bristol : IOP publishing, 2012
|
|
| ISSN |
|
|
|
1674-1056
|
|
| Volume/pages |
|
|
|
21:7(2012), 6 p.
|
|
| Article Reference |
|
|
|
075203
|
|
| ISI |
|
|
|
000306558300058
|
|
| Medium |
|
|
|
E-only publicatie
|
|
| Full text (Publishers DOI) |
|
|
| |
|
| Full text (publishers version - intranet only) |
|
|
| |
|