| Title |
|
|
|
Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
|
|
| Author |
|
|
|
|
|
| Abstract |
|
|
| |
|
| Language |
|
|
|
English
|
|
| Source (journal) |
|
|
|
Chinese physics B / Chinese Physical Society [Beijing] - Bristol, 2008, currens |
|
| Publication |
|
|
|
Bristol : IOP Publishing, 2012
|
|
| ISSN |
|
|
|
1674-1056 [print]
2058-3834 [online]
|
|
| Volume/pages |
|
|
|
21:7(2012), 6 p.
|
|
| Article Reference |
|
|
|
075203
|
|
| ISI |
|
|
|
000306558300058
|
|
| Medium |
|
|
|
E-only publicatie
|
|
| Full text (Publisher's DOI) |
|
|
| |
|
| Full text (publisher's version - intranet only) |
|
|
| |
|