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Title
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Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
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Author
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Abstract
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| A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure. |
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Language
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English
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Source (journal)
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Chinese physics B / Chinese Physical Society [Beijing] - Bristol, 2008, currens
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Publication
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Bristol
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IOP Publishing
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2012
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ISSN
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1674-1056
[print]
2058-3834
[online]
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DOI
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10.1088/1674-1056/21/7/075203
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Volume/pages
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21
:7
(2012)
, 6 p.
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Article Reference
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075203
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ISI
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000306558300058
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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