Title |
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Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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Chinese physics B / Chinese Physical Society [Beijing] - Bristol, 2008, currens |
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Publication |
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Bristol : IOP Publishing, 2012
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ISSN |
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1674-1056 [print]
2058-3834 [online]
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Volume/pages |
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21:7(2012), 6 p.
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Article Reference |
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075203
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ISI |
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000306558300058
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Medium |
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E-only publicatie
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Full text (Publisher's DOI) |
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Full text (publisher's version - intranet only) |
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