Publication
Title
Fluid simulation of the phase-shift effect in capacitively coupled plasmas
Author
Abstract
Language
English
Source (journal)
Journal of physics: D: applied physics. - London
Publication
London : 2012
ISSN
0022-3727
Volume/pages
45:48(2012), 16 p.
Article Reference
485204
ISI
000311148300011
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 19.11.2012
Last edited 28.05.2018
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