Title |
|
|
|
In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
| |
Author |
|
|
|
| |
Abstract |
|
|
| | |
Language |
|
|
|
English
| |
Source (journal) |
|
|
|
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens | |
Publication |
|
|
|
New York, N.Y. : American Institute of Physics, 2001
| |
ISSN |
|
|
|
0021-8979 [print]
1089-7550 [online]
| |
Volume/pages |
|
|
|
90:1(2001), p. 167-174
| |
ISI |
|
|
|
000169361100023
| |
Full text (Publisher's DOI) |
|
|
| | |
|