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In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens | |
| Publication |
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New York, N.Y. : American Institute of Physics, 2001
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| ISSN |
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0021-8979 [print]
1089-7550 [online]
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| Volume/pages |
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90:1(2001), p. 167-174
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| ISI |
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000169361100023
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