| Title |
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Clustering of vacancies on {113} planes in Si layers close to Si- interfaces and further aggregation of self-interstitials inside vacancy clusters during electron irradiation
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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CONFERENCE SERIES- INSTITUTE OF PHYSICS | |
| Source (book) |
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Conference on Microscopy of Semiconducting Materials, MAR 22-25, 1999, UNIV OXFORD, OXFORD, ENGLAND | |
| Publication |
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1999
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| ISBN |
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0-7503-0650-5
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| Volume/pages |
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164(1999), p. 495-498
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| ISI |
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000166835300106
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