| Title |
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Non-additive sputtering of niobium and tantalum as neutral and charged clusters
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam |
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| Publication |
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Amsterdam : 2003
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| ISSN |
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0168-583X
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| Volume/pages |
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203(2003), p. 164-171
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| ISI |
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000182624600027
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| Full text (Publisher's DOI) |
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| Full text (publisher's version - intranet only) |
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