Title |
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Non-additive sputtering of niobium and tantalum as neutral and charged clusters
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam |
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Publication |
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Amsterdam : 2003
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ISSN |
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0168-583X
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Volume/pages |
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203(2003), p. 164-171
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ISI |
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000182624600027
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Full text (Publisher's DOI) |
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Full text (publisher's version - intranet only) |
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