Publication
Title
Non-additive sputtering of niobium and tantalum as neutral and charged clusters
Author
Abstract
Language
English
Source (journal)
Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam
Publication
Amsterdam : 2003
ISSN
0168-583X
Volume/pages
203(2003), p. 164-171
ISI
000182624600027
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 19.05.2018
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