| Title |
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Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEM
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Physica: B: condensed matter. - Amsterdam | |
| Source (book) |
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21st International Conference on Defects in Semiconductors, JUL 16-20, 2001, GIESSEN, GERMANY | |
| Publication |
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Amsterdam : Elsevier science bv, 2001
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| ISSN |
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0921-4526
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| Volume/pages |
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308(2001), p. 294-297
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| ISI |
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000173660100073
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