Publication
Title
Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures
Author
Abstract
Language
English
Source (journal)
Journal of the electrochemical society. - New York, N.Y.
Publication
New York, N.Y. : 2001
ISSN
0013-4651
Volume/pages
148:11(2001), p. G597-G601
ISI
000171653100038
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 11.12.2018
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