| Title |
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Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Journal of the electrochemical society. - New York, N.Y. | |
| Publication |
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New York, N.Y. : 2001
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| ISSN |
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0013-4651
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| Volume/pages |
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148:11(2001), p. G597-G601
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| ISI |
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000171653100038
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| Full text (Publisher's DOI) |
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