Publication
Title
Compositional analysis based on electron holography and a chemically sensitive reflection
Author
Abstract
A method for compositional analysis of low-dimensional heterostructures is presented. The suggested procedure is based on electron holography and the exploitation of the chemically sensitive (0 0 2) reflection. We apply an off-axis imaging condition with the (0 0 2) beam strongly excited and centered on the optic axis. The first side band of the hologram is centered using an "empty" reference hologram obtained for a hole of the specimen. From the centered side band we use the phase of the central (0 0 0) and the amplitude of the (0 0 2) reflections to evaluate the local composition and the local specimen thickness in an iterative and self-consistent way. Delocalization effects that lead to a shift of the spatial information of (0 0 0) and (0 0 2) reflections are taken into account. The application of the procedure is demonstrated with an AlAs/GaAs(0 0 1) superlattice with a period of 5 nm. The concentration profiles obtained are discussed in relation to segregation. The measured segregation efficiency is R = 0.51 +/- 0.02. (C) 2001 Elsevier Science B.V. All rights reserved.
Language
English
Source (journal)
Ultramicroscopy. - Amsterdam
Publication
Amsterdam : 2001
ISSN
0304-3991
DOI
10.1016/S0304-3991(00)00115-7
Volume/pages
88 :1 (2001) , p. 51-61
ISI
000168940900005
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identifier
Creation 03.01.2013
Last edited 28.08.2024
To cite this reference