|
Title
|
|
|
|
Compositional analysis based on electron holography and a chemically sensitive reflection
|
|
|
Author
|
|
|
|
|
|
|
Abstract
|
|
|
|
| A method for compositional analysis of low-dimensional heterostructures is presented. The suggested procedure is based on electron holography and the exploitation of the chemically sensitive (0 0 2) reflection. We apply an off-axis imaging condition with the (0 0 2) beam strongly excited and centered on the optic axis. The first side band of the hologram is centered using an "empty" reference hologram obtained for a hole of the specimen. From the centered side band we use the phase of the central (0 0 0) and the amplitude of the (0 0 2) reflections to evaluate the local composition and the local specimen thickness in an iterative and self-consistent way. Delocalization effects that lead to a shift of the spatial information of (0 0 0) and (0 0 2) reflections are taken into account. The application of the procedure is demonstrated with an AlAs/GaAs(0 0 1) superlattice with a period of 5 nm. The concentration profiles obtained are discussed in relation to segregation. The measured segregation efficiency is R = 0.51 +/- 0.02. (C) 2001 Elsevier Science B.V. All rights reserved. |
|
|
|
Language
|
|
|
|
English
|
|
|
Source (journal)
|
|
|
|
Ultramicroscopy. - Amsterdam
|
|
|
Publication
|
|
|
|
Amsterdam
:
2001
|
|
|
ISSN
|
|
|
|
0304-3991
|
|
|
DOI
|
|
|
|
10.1016/S0304-3991(00)00115-7
|
|
|
Volume/pages
|
|
|
|
88
:1
(2001)
, p. 51-61
|
|
|
ISI
|
|
|
|
000168940900005
|
|
|
Full text (Publisher's DOI)
|
|
|
|
|
|
|
Full text (publisher's version - intranet only)
|
|
|
|
|
|