Publication
Title
EFTEM study of plasma etched low-k Si-O-C dielectrics
Author
Abstract
Language
English
Source (journal)
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Source (book)
Royal-Microscopical-Society Conference on Microscopy of Semiconducting, Materials, MAR 25-29, 2001, UNIV OXFORD, OXFORD, ENGLAND
Publication
2001
ISBN
0-7503-0818-4
Volume/pages
169(2001), p. 415-418
ISI
000176465200088
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 26.09.2018
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