Publication
Title
Accurate infrared spectroscopy determination of interstitial and precipitated oxygen in highly doped Czochralski-grown silicon
Author
Abstract
Language
English
Source (journal)
The review of scientific instruments. - New York, N.Y.
Publication
New York, N.Y. : 1999
ISSN
0034-6748
Volume/pages
70:9(1999), p. 3661-3663
ISI
000082289200026
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 09.10.2018
To cite this reference