Publication
Title
Compact and high-accuracy RF MEMS capacitive series devices
Author
Abstract
Language
English
Source (journal)
Proceedings of the Society of Photo-optical Instrumentation Engineers / SPIE: International Society for Optical Engineering. - Bellingham, Wash.
Source (book)
Conference on MEMS/MOEMS Components and Their Applications II, JAN 24-25, 2005, San Jose, CA
Publication
Bellingham, Wash. : SPIE - The International Society for Optical Engineering, 2005
ISBN
0-8194-5691-8
Volume/pages
5717(2005), p. 55-65
ISI
000228860900011
Full text (Publisher's DOI)
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 15.08.2018
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