Publication
Title
Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
Author
Abstract
Language
English
Source (journal)
ULTRASONICS SYMPOSIUM
Source (book)
IEEE International Ultrasonics Symposium, SEP 18-21, 2005, Rotterdam, NETHERLANDS
Publication
2005
ISBN
0-7803-9382-1
Volume/pages
(2005), p. 1840-1843
ISI
000236090702105
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 23.06.2018
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