| Title |
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Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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ULTRASONICS SYMPOSIUM | |
| Source (book) |
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IEEE International Ultrasonics Symposium, SEP 18-21, 2005, Rotterdam, NETHERLANDS | |
| Publication |
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2005
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| ISBN |
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0-7803-9382-1
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| Volume/pages |
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(2005), p. 1840-1843
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| ISI |
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000236090702105
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