| Title |
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Ge deep sub-micron pFETs with etched TaN metal gate on a High-K dielectric, fabricated in a 200mm silicon prototyping line
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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ESSDERC 2004: PROCEEDINGS OF THE 34TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | |
| Source (book) |
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34th European Solid-State Device Research Conference (ESSDERC 2004), SEP 21-23, 2004, Leuven, BELGIUM | |
| Publication |
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New york : Ieee, 2004
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| ISBN |
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0-7803-8478-4
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| Volume/pages |
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(2004), p. 189-192
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| ISI |
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000225486100040
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| Full text (Publisher's DOI) |
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