Publication
Title
Modelling of the RF self-actuation of electrostatic RF-MEMS devices
Author
Abstract
Language
English
Source (journal)
Proceedings IEEE Micro Electro Mechanical Systems / Institute of Electrical and Electronics Engineers. Robotics and Automation Society. Micro Electro Mechanical Systems [New York] - New York, N.Y.
Mechanical systems, technical digest
Source (book)
17th IEEE International Conference on Micro Electro Mechanical Systems, JAN 25-29, 2004, Maastricht, NETHERLANDS
Publication
New York, N.Y. : 2004
ISBN
0-7803-8265-X
Volume/pages
(2004), p. 245-248
ISI
000189435200061
Full text (Publisher's DOI)
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 13.12.2018
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