| Title |
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The influence of surface fluctuations on early failures in single-damascene Cu wires : a weakest link approximation analysis
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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2004 IEEE International reliability symposium proceedings | |
| Source (book) |
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42nd Annual IEEE International Reliability Physics Symposium, APR 25-29, 2004, Phoenix, AZ | |
| Publication |
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New york : Ieee, 2004
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| ISBN |
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0-7803-8315-X
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| Volume/pages |
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(2004), p. 625-626
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| ISI |
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000222139900130
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| Full text (Publisher's DOI) |
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