| Title |
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Physcial characterization of ultrathin high k dielectrics
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Materials Research Society symposium proceedings. - Wuhan | |
| Source (book) |
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Symposium on Novel Materials and Processes for Advanced CMOS held at the, 2002 MRS Fall Meeting, DEC 02-04, 2002, BOSTON, MA | |
| Publication |
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Wuhan : 2003
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| ISBN |
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1-55899-682-6
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| Volume/pages |
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745(2003), p. 23-33
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| ISI |
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000182316500004
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