Publication
Title
Physcial characterization of ultrathin high k dielectrics
Author
Abstract
Language
English
Source (journal)
Materials Research Society symposium proceedings. - Wuhan
Source (book)
Symposium on Novel Materials and Processes for Advanced CMOS held at the, 2002 MRS Fall Meeting, DEC 02-04, 2002, BOSTON, MA
Publication
Wuhan : 2003
ISBN
1-55899-682-6
Volume/pages
745(2003), p. 23-33
ISI
000182316500004
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 19.09.2018
To cite this reference