Title |
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Physcial characterization of ultrathin high k dielectrics
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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Materials Research Society symposium proceedings. - Wuhan | |
Source (book) |
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Symposium on Novel Materials and Processes for Advanced CMOS held at the, 2002 MRS Fall Meeting, DEC 02-04, 2002, BOSTON, MA | |
Publication |
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Wuhan : 2003
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ISBN |
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1-55899-682-6
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Volume/pages |
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745(2003), p. 23-33
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ISI |
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000182316500004
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