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Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Proceedings of the Society of Photo-optical Instrumentation Engineers / SPIE: International Society for Optical Engineering. - Bellingham, Wash. | |
| Source (book) |
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Conference on Smart Sensors, Actuators, and MEMS, MAY 19-21, 2003, MASPALOMAS, SPAIN | |
| Publication |
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Bellingham, Wash. : SPIE - The International Society for Optical Engineering, 2003
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| ISBN |
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0-8194-4976-8
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| Volume/pages |
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5116(2003), p. 607-616
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| ISI |
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000184053200069
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| Full text (Publisher's DOI) |
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