Publication
Title
Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Author
Abstract
Language
English
Source (journal)
Proceedings of the Society of Photo-optical Instrumentation Engineers / SPIE: International Society for Optical Engineering. - Bellingham, Wash.
Source (book)
Conference on Smart Sensors, Actuators, and MEMS, MAY 19-21, 2003, MASPALOMAS, SPAIN
Publication
Bellingham, Wash. : SPIE - The International Society for Optical Engineering, 2003
ISBN
0-8194-4976-8
Volume/pages
5116(2003), p. 607-616
ISI
000184053200069
Full text (Publisher's DOI)
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 02.08.2018
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