Title
Segregation of gallium at <tex>$SiO_{2}/Si$</tex> interfaces during sputtering with <tex>$Ga^{+}$</tex> ions : experimental and computer simulation study Segregation of gallium at <tex>$SiO_{2}/Si$</tex> interfaces during sputtering with <tex>$Ga^{+}$</tex> ions : experimental and computer simulation study
Author
Publication type
article
Publication
Amsterdam ,
Subject
Physics
Chemistry
Source (journal)
Applied surface science. - Amsterdam
Volume/pages
187(2002) :1-2 , p. 145-153
ISSN
0169-4332
ISI
000175089200018
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
The sputtering of SiO2/Si interfaces with gallium ions was studied both experimentally by using secondary neutral mass spectrometry (SNMS) and by computer simulations by means of a dynamic Monte Carlo code. Oscillations of the gallium signal (from implanted primary ions) at the interface between the SiO2 and Si layers were observed. By means of computer simulations, it was shown that cascade effects alone cannot explain the experimental depth profiles. A model that includes additional defect transport phenomena such as bombardment-induced segregation is proposed and incorporated in an existing dynamic Monte Carlo computer code. The simulations with the new code give rise to profiles that are comparable with the experimental ones, confirming the correctness of the chosen approach. (C) 2002 Elsevier Science B.V. All rights reserved.
E-info
https://repository.uantwerpen.be/docman/iruaauth/66ef2c/e166762.pdf
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