Title |
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Line edge roughness : characterization, modeling and impact on device behavior
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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International electron devices 2002 meeting, technical digest | |
Source (book) |
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IEEE International Electron Devices Meeting, DEC 08-11, 2002, SAN FRANCISCO, CA | |
Publication |
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2002
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ISBN |
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0-7803-7462-2
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Volume/pages |
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(2002), p. 307-310
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ISI |
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000185143400070
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