Publication
Title
Line edge roughness : characterization, modeling and impact on device behavior
Author
Abstract
Language
English
Source (journal)
International electron devices 2002 meeting, technical digest
Source (book)
IEEE International Electron Devices Meeting, DEC 08-11, 2002, SAN FRANCISCO, CA
Publication
2002
ISBN
0-7803-7462-2
Volume/pages
(2002), p. 307-310
ISI
000185143400070
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 14.10.2018
To cite this reference