| Title |
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Line edge roughness : characterization, modeling and impact on device behavior
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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International electron devices 2002 meeting, technical digest | |
| Source (book) |
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IEEE International Electron Devices Meeting, DEC 08-11, 2002, SAN FRANCISCO, CA | |
| Publication |
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2002
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| ISBN |
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0-7803-7462-2
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| Volume/pages |
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(2002), p. 307-310
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| ISI |
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000185143400070
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