Publication
Title
The origins of fluorine in dry ultrathin silicon oxides
Author
Abstract
Language
English
Source (journal)
Diffusion and defect data : solid state data : part B : solid state phenomena. - Vaduz, 1988, currens
Source (book)
5th International Symposium on Ultra Clean Processing of Silicon, Surfaces (UCPSS 2000), SEP 18-20, 2000, OOSTENDE, BELGIUM
Publication
Vaduz : 2001
ISBN
3-908450-57-8
Volume/pages
76-77(2001), p. 153-156
ISI
000168449500037
Full text (Publisher's DOI)
UAntwerpen
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 01.09.2018
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