| Title |
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The origins of fluorine in dry ultrathin silicon oxides
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Diffusion and defect data : solid state data : part B : solid state phenomena. - Vaduz, 1988, currens | |
| Source (book) |
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5th International Symposium on Ultra Clean Processing of Silicon, Surfaces (UCPSS 2000), SEP 18-20, 2000, OOSTENDE, BELGIUM | |
| Publication |
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Vaduz : 2001
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| ISBN |
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3-908450-57-8
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| Volume/pages |
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76-77(2001), p. 153-156
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| ISI |
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000168449500037
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| Full text (Publisher's DOI) |
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