Publication
Title
Improved phosphoric acid mixtures for nitride strip
Author
Abstract
Language
English
Source (journal)
Diffusion and defect data : solid state data : part B : solid state phenomena. - Vaduz, 1988, currens
Source (book)
5th International Symposium on Ultra Clean Processing of Silicon, Surfaces (UCPSS 2000), SEP 18-20, 2000, OOSTENDE, BELGIUM
Publication
Vaduz : 2001
ISBN
3-908450-57-8
Volume/pages
76-77(2001), p. 43-46
ISI
000168449500011
Full text (Publisher's DOI)
UAntwerpen
Publication type
Subject
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 12.09.2018