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Title
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Improved understanding and characterisation of rapid thermal oxides
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Author
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Language
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English
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Source (journal)
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Conference record of the twenty fifth IEEE photovoltaic specialists conference- 1996
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Source (book)
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25th IEEE Photovoltaic Specialists Conference, MAY 13-17, 1996, WASHINGTON, DC
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Publication
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1996
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ISBN
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0-7803-3167-2
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DOI
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10.1109/PVSC.1996.564073
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Volume/pages
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(1996)
, p. 581-584
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ISI
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A1996BG63B00138
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Full text (Publisher's DOI)
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