Publication
Title
Plasma-enhanced chemical-vapor-deposition of amorphous films
Author
Abstract
Language
English
Source (journal)
Journal of non-crystalline solids. - Amsterdam
Source (book)
15th International Conference on Amorphous Semiconductors - Science and, Technology, SEP 06-10, 1993, CAMBRIDGE, ENGLAND
Publication
Amsterdam : 1993
ISSN
0022-3093
Volume/pages
166:Part 2(1993), p. 1195-1198
ISI
A1993MT78200133
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 02.08.2018
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