Title |
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Plasma-enhanced chemical-vapor-deposition of amorphous films
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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Journal of non-crystalline solids. - Amsterdam | |
Source (book) |
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15th International Conference on Amorphous Semiconductors - Science and, Technology, SEP 06-10, 1993, CAMBRIDGE, ENGLAND | |
Publication |
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Amsterdam : 1993
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ISSN |
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0022-3093
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Volume/pages |
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166:Part 2(1993), p. 1195-1198
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ISI |
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A1993MT78200133
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