Title
Reliability of copper dual damascene influenced by pre-cleanReliability of copper dual damascene influenced by pre-clean
Author
Faculty/Department
Faculty of Sciences. Physics
Faculty of Pharmaceutical, Biomedical and Veterinary Sciences. Pharmacy
Research group
Electron microscopy for materials research (EMAT)
Publication type
conferenceObject
Publication
New york :Ieee,
Subject
Physics
Source (journal)
PROCEEDINGS OF THE 9TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE
ANALYSIS OF INTEGRATED CIRCUITS
Source (book)
9th International Symposium on the Physical and Failure Analysis of, Integrated Circuits (IPFA 2002), JUL 08-12, 2002, SINGAPORE, SINGAPORE
Volume/pages
(2002), p. 118-123
ISBN
0-7803-7416-9
ISI
000177689400022
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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