Publication
Title
Reliability of copper dual damascene influenced by pre-clean
Author
Language
English
Source (journal)
PROCEEDINGS OF THE 9TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE
ANALYSIS OF INTEGRATED CIRCUITS
Source (book)
9th International Symposium on the Physical and Failure Analysis of, Integrated Circuits (IPFA 2002), JUL 08-12, 2002, SINGAPORE, SINGAPORE
Publication
New york : Ieee , 2002
ISBN
0-7803-7416-9
DOI
10.1109/IPFA.2002.1025629
Volume/pages
(2002) , p. 118-123
ISI
000177689400022
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identifier
Creation 03.01.2013
Last edited 04.03.2024
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