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Title
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Reliability of copper dual damascene influenced by pre-clean
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Author
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Language
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English
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Source (journal)
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PROCEEDINGS OF THE 9TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE
ANALYSIS OF INTEGRATED CIRCUITS
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Source (book)
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9th International Symposium on the Physical and Failure Analysis of, Integrated Circuits (IPFA 2002), JUL 08-12, 2002, SINGAPORE, SINGAPORE
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Publication
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New york
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Ieee
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2002
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ISBN
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0-7803-7416-9
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Volume/pages
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(2002)
, p. 118-123
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ISI
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000177689400022
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Full text (Publisher's DOI)
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