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Reliability of copper dual damascene influenced by pre-clean
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| Author |
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| Language |
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English
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| Source (journal) |
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PROCEEDINGS OF THE 9TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE
ANALYSIS OF INTEGRATED CIRCUITS | |
| Source (book) |
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9th International Symposium on the Physical and Failure Analysis of, Integrated Circuits (IPFA 2002), JUL 08-12, 2002, SINGAPORE, SINGAPORE | |
| Publication |
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New york : Ieee, 2002
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| ISBN |
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0-7803-7416-9
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| Volume/pages |
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(2002), p. 118-123
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| ISI |
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000177689400022
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| Full text (Publisher's DOI) |
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