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Title
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Simulation of plasma processes in plasma assisted CVD reactors
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Author
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Language
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English
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Source (book)
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Proceedings 24th International Conference on Phenomena in Ionized Gases, July 11-16, 1999, Warsaw, Poland
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Publication
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1999
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Volume/pages
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(1999)
, p. 213-214
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ISI
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000165992500107
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