Publication
Title
Simulation of plasma processes in plasma assisted CVD reactors
Author
Language
English
Source (book)
Proceedings 24th International Conference on Phenomena in Ionized Gases, July 11-16, 1999, Warsaw, Poland
Publication
1999
Volume/pages
(1999), p. 213-214
ISI
000165992500107
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 03.01.2013
Last edited 03.05.2017
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