| Title |
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Simulation of plasma processes in plasma assisted CVD reactors
| |
| Author |
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| |
| Language |
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English
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| Source (book) |
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Proceedings 24th International Conference on Phenomena in Ionized Gases, July 11-16, 1999, Warsaw, Poland | |
| Publication |
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1999
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| Volume/pages |
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(1999), p. 213-214
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| ISI |
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000165992500107
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