Title
Simulation of plasma processes in plasma assisted CVD reactorsSimulation of plasma processes in plasma assisted CVD reactors
Author
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Department of Chemistry
Publication type
conferenceObject
Publication
[*]
Subject
Physics
Source (book)
Proceedings 24th International Conference on Phenomena in Ionized Gases, July 11-16, 1999, Warsaw, Poland
ISI
000165992500107
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
E-info
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Handle