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Title
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Laser thermotreatment of the layers
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Author
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Abstract
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| The optical and electrical properties and pi ase composition of magnetron sputtered antimony-doped SnOx thin films are investigated before and after laser thermotreatment The temperature dependencies on mobility and concentration of free charges are measured by Van der Pauw method. The gas sensitivity of SnOx has been measured before and after laser thermotreatment. |
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Language
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English
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Source (journal)
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Eurosensors XII, vols 1 and 2
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Source (book)
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12th European Conference on Solid-State Transducers - 9th UK Conference, on Sensors and Their Applications, SEP 13-16, 1998, SOUTHAMPTON, ENGLAND
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Publication
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1998
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ISBN
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0-7503-0536-3
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Volume/pages
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(1998)
, p. 481-484
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ISI
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000077311200117
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