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Nanoscaled interdigitated electrode arrays for biochemical sensors
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| Abstract |
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| Nanoscaled interdigitated electrode arrays were made with Deep U.V. lithography. Electrode widths and spacings from 500 nm down to 250 nm were achieved on large active areas (0.5 mm x 1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. antigens, DNA) by impedimetric measurements. Such sensor is developed, theoretically analyzed, experimentally characterized, and will be demonstrated as an affinity biosensor. | | |
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English
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TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | |
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1997 International Conference on Solid-State Sensors and Actuators, JUN 16-19, 1997, CHICAGO, IL | |
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1997
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| ISBN |
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0-7803-3829-4
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(1997), p. 907-910
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| ISI |
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A1997BJ35B00221
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| Full text (publisher's version - intranet only) |
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