Title
Ultra-resolution on a FEG-TEM by phase retrieval through focus variation Ultra-resolution on a FEG-TEM by phase retrieval through focus variation
Author
Faculty/Department
Faculty of Sciences. Biology
Faculty of Sciences. Physics
Publication type
article
Publication
Subject
Physics
Source (journal)
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Source (book)
Conference of the Electron-Microscopy-and-Analysis-Group of the, Institute-of-Physics: Electron Microscopy and Analysis 1993 (EMAG93), SEP 14-17, 1993, UNIV LIVERPOOL, LIVERPOOL, ENGLAND
Volume/pages
(1993) :138 , p. 225-230
ISSN
0951-3248
ISBN
0-7503-0321-2
ISI
A1993BA56Z00053
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
Abstract
A field emission gun (FEG) in transmission electron microscopy (TEM) has a high potential in the run towards I Angstrom microscopy. Digital image reconstruction, applied on a focal image series, enables to retrieve faithfully the amplitude and phase at the specimen exit plane with a resolution much better than the point resolution. On a 300 kV FEG-TEM an information limit of 1.1 Angstrom has been obtained. The oxygen sublattice in a high-Tc superconductor and in a ferroelectric oxide has been revealed as well as the atomic stacking in Si <113>.
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