Ultra-resolution on a FEG-TEM by phase retrieval through focus variation
Faculty of Sciences. Biology
Faculty of Sciences. Physics
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Conference of the Electron-Microscopy-and-Analysis-Group of the, Institute-of-Physics: Electron Microscopy and Analysis 1993 (EMAG93), SEP 14-17, 1993, UNIV LIVERPOOL, LIVERPOOL, ENGLAND
, p. 225-230
University of Antwerp
A field emission gun (FEG) in transmission electron microscopy (TEM) has a high potential in the run towards I Angstrom microscopy. Digital image reconstruction, applied on a focal image series, enables to retrieve faithfully the amplitude and phase at the specimen exit plane with a resolution much better than the point resolution. On a 300 kV FEG-TEM an information limit of 1.1 Angstrom has been obtained. The oxygen sublattice in a high-Tc superconductor and in a ferroelectric oxide has been revealed as well as the atomic stacking in Si <113>.