Publication
Title
Round-robin investigation of silicon-oxide on silicon reference materials for ellipsometry
Author
Vanhellemont, J.
Maes, H.E.
Schaekers, M.
van Landuyt, J.
et al.
Abstract
Language
English
Source (journal)
Applied surface science. - Amsterdam
Source (book)
SYMP ON DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS ANALYSIS AND, FABRICATION PROCESS CONTROL, AT THE 1992 SPRING CONF OF THE EUROPEAN, MATERIALS RESEARCH SOC, JUN 02-05, 1992, STRASBOURG, FRANCE
Publication
Amsterdam
:
Elsevier science bv
,
1993
ISSN
0169-4332
Volume/pages
63:1-4(1993), p. 45-51
ISI
A1993KF03400009
Full text (Publisher's DOI)
https://doi.org/10.1016/0169-4332(93)90062-G
Full text (publisher's version - intranet only)
https://repository.uantwerpen.be/docman/iruaauth/cc45af/8ef4122.pdf
UAntwerpen
Faculty/Department
Faculty of Sciences. Physics
Research group
Electron microscopy for materials research (EMAT)
Publication type
A1 Journal article
Subject
Physics
Chemistry
External links
Web of Science
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Record
Identification
Creation
03.01.2013
Last edited
02.03.2021