Round-robin investigation of silicon-oxide on silicon reference materials for ellipsometry

Vanhellemont, J.; Maes, H.E.; Schaekers, M.; van Landuyt, J.; et al.

doi:10.1016/0169-4332(93)90062-G

Publication

Title

Round-robin investigation of silicon-oxide on silicon reference materials for ellipsometry

Author

Vanhellemont, J.

Maes, H.E.

Schaekers, M.

van Landuyt, J.

et al.

Abstract

Language

English

Source (journal)

Applied surface science. - Amsterdam

Source (book)

SYMP ON DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS ANALYSIS AND, FABRICATION PROCESS CONTROL, AT THE 1992 SPRING CONF OF THE EUROPEAN, MATERIALS RESEARCH SOC, JUN 02-05, 1992, STRASBOURG, FRANCE

Publication

Amsterdam : Elsevier science bv, 1993

ISSN

0169-4332

Volume/pages

63:1-4(1993), p. 45-51

ISI

A1993KF03400009

Full text (Publisher's DOI)

https://doi.org/10.1016/0169-4332(93)90062-G

Full text (publisher's version - intranet only)

https://repository.uantwerpen.be/docman/iruaauth/cc45af/8ef4122.pdf

UAntwerpen

Faculty/Department				Faculty of Sciences. Physics

Research group				Electron microscopy for materials research (EMAT)

Publication type				A1 Journal article

Subject				Physics Chemistry

External links

Web of Science

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Record

Identification

Creation				03.01.2013

Last edited				12.12.2018