Publication
Title
Round-robin investigation of silicon-oxide on silicon reference materials for ellipsometry
Author
Abstract
Language
English
Source (journal)
Applied surface science. - Amsterdam
Source (book)
SYMP ON DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS ANALYSIS AND, FABRICATION PROCESS CONTROL, AT THE 1992 SPRING CONF OF THE EUROPEAN, MATERIALS RESEARCH SOC, JUN 02-05, 1992, STRASBOURG, FRANCE
Publication
Amsterdam : Elsevier science bv, 1993
ISSN
0169-4332
Volume/pages
63:1-4(1993), p. 45-51
ISI
A1993KF03400009
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
External links
Web of Science
Record
Identification Error report