Title
Toward electron exit wave tomography of amorphous materials at atomic resolution Toward electron exit wave tomography of amorphous materials at atomic resolution
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Amsterdam ,
Subject
Physics
Chemistry
Engineering sciences. Technology
Source (journal)
Journal of alloys and compounds. - Amsterdam
Volume/pages
536(2012) :s:[1] , p. S94-S98
ISSN
0925-8388
ISI
000310837500022
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
We suggest to use electron exit wave phase for tomographic reconstruction of structure of Au-doped amorphous Si with atomic resolution. In the present theoretical investigation into the approach it is found that the number of projections and the accuracy of defocus in the focal series restoration are the main factors that contribute to the final resolution. Although resolution is ultimately limited by these factors, phase shifts in the exit wave are sufficient to identify the position of Au atoms in an amorphous Si needle model, even when only 19 projections with defocus error of 4 nm are used. Electron beam damage will probably further limit the resolution of such tomographic reconstructions, however beam damage can be mitigated using lower accelerating voltages. (c) 2011 Elsevier B.V. All rights reserved.
E-info
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