Title |
|
|
|
Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas
|
|
Author |
|
|
|
|
|
Abstract |
|
|
| |
|
Language |
|
|
|
English
|
|
Source (journal) |
|
|
|
Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens |
|
Publication |
|
|
|
Bristol : Institute of Physics, 2013
|
|
ISSN |
|
|
|
0963-0252
|
|
Volume/pages |
|
|
|
22:2(2013), p. 1-8
|
|
Article Reference |
|
|
|
025014
|
|
ISI |
|
|
|
000317275400016
|
|
Medium |
|
|
|
E-only publicatie
|
|
Full text (Publisher's DOI) |
|
|
| |
|
Full text (publisher's version - intranet only) |
|
|
| |
|