| Title |
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Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens |
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| Publication |
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Bristol : Institute of Physics, 2013
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| ISSN |
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0963-0252
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| Volume/pages |
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22:2(2013), p. 1-8
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| Article Reference |
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025014
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| ISI |
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000317275400016
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| Medium |
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E-only publicatie
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| Full text (publisher's version - intranet only) |
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