| Title |
|
|
|
Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas
| |
| Author |
|
|
|
| |
| Abstract |
|
|
| | |
| Language |
|
|
|
English
| |
| Source (journal) |
|
|
|
Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens | |
| Publication |
|
|
|
Bristol : Institute of Physics, 2013
| |
| ISSN |
|
|
|
0963-0252
| |
| Volume/pages |
|
|
|
22:2(2013), p. 1-8
| |
| Article Reference |
|
|
|
025014
| |
| ISI |
|
|
|
000317275400016
| |
| Medium |
|
|
|
E-only publicatie
| |
| Full text (Publisher's DOI) |
|
|
| | |
| Full text (publisher's version - intranet only) |
|
|
| | |
|