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Title
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Modeling aspects of plasma-enhanced chemical vapor deposition of carbon-based materials
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Author
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Language
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English
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Source (book)
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Plasma processing of nanomaterials / Sankaran, R.M. [edit.]
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Publication
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Boca Raton, Fla
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CRC Press
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2012
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ISBN
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978-1-4398-6676-4
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Volume/pages
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p. 245-290
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