Title
Determination of ultimate leakage through rutile <tex>$TiO_{2}$</tex> and tetragonal <tex>$ZrO_{2}$</tex> from ab initio complex band calculations
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Source (journal)
IEEE electron device letters
Volume/pages
34(2013) :3 , p. 402-404
ISSN
0741-3106
ISI
000315723000024
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
First-principle complex band structures have been computed for rutile TiO2 and tetragonal ZrO2 insulating materials that are of current technological relevance to dynamic random accessmemorymetal-insulator-metal (MIM) capacitors. From the magnitude of the complex wave vectors in different orientations, the most penetrating orientations have been identified. Tunneling effective masses m(tunnel) have been extracted, are shown to be a crucial parameter for the intrinsic leakage, and are identified to be an important parameter in further scaling of MIM capacitors.
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