Publication
Title
Determination of ultimate leakage through rutile $TiO_{2}$ and tetragonal $ZrO_{2}$ from ab initio complex band calculations
Author
Abstract
 First-principle complex band structures have been computed for rutile TiO2 and tetragonal ZrO2 insulating materials that are of current technological relevance to dynamic random accessmemorymetal-insulator-metal (MIM) capacitors. From the magnitude of the complex wave vectors in different orientations, the most penetrating orientations have been identified. Tunneling effective masses m(tunnel) have been extracted, are shown to be a crucial parameter for the intrinsic leakage, and are identified to be an important parameter in further scaling of MIM capacitors.
Language
English
Source (journal)
IEEE electron device letters
Publication
2013
ISSN
0741-3106
Volume/pages
34:3(2013), p. 402-404
ISI
000315723000024
Full text (Publisher's DOI)
UAntwerpen
 Faculty/Department Research group Publication type Affiliation Publications with a UAntwerp address