Publication
Title
Towards CMOS-compatible single-walled carbon nanotube resonators
Author
Abstract
We report a totally CMOS-compatible fabrication technique to assemble horizontally suspended single-walled carbon nanotube (SWCNT) resonators. Individual SWCNTs are assembled in parallel at multiple sites by a technique called dielectrophoresis. The mechanical resonance frequencies of the suspended SWCNTs are in the range of 2035 MHz as determined from the piezoresistive response of the resonators during electrostatic actuation. The resistance of the suspended SWCNT either remains unchanged or increases or decreases significantly as a function of the actuation frequency. This can be explained by the effect the nanotube chirality has on the piezoresistive gauge factor.
Language
English
Source (journal)
Microelectronic engineering. - Amsterdam
Publication
Amsterdam : 2013
ISSN
0167-9317
Volume/pages
107(2013), p. 219-222
ISI
000319855800040
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 30.07.2013
Last edited 19.10.2017
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