Publication
Title
Numerical investigation of coating deposition in wafer processing reactors with inductively coupled plasmas
Author
Abstract
Language
English
Source (journal)
Plasma processes and polymers. - Weinheim
Publication
Weinheim : 2013
ISSN
1612-8850
Volume/pages
10:8(2013), p. 714-730
ISI
000327790000006
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 10.09.2013
Last edited 12.06.2018
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