Title 



Atom counting in HAADF STEM using a statistical modelbased approach : methodology, possibilities, and inherent limitations
 
Author 



 
Abstract 



In the present paper, a statistical modelbased method to count the number of atoms of monotype crystalline nanostructures from high resolution highangle annular darkfield (HAADF) scanning transmission electron microscopy (STEM) images is discussed in detail together with a thorough study on the possibilities and inherent limitations. In order to count the number of atoms, it is assumed that the total scattered intensity scales with the number of atoms per atom column. These intensities are quantitatively determined using modelbased statistical parameter estimation theory. The distribution describing the probability that intensity values are generated by atomic columns containing a specific number of atoms is inferred on the basis of the experimental scattered intensities. Finally, the number of atoms per atom column is quantified using this estimated probability distribution. The number of atom columns available in the observed STEM image, the number of components in the estimated probability distribution, the width of the components of the probability distribution, and the typical shape of a criterion to assess the number of components in the probability distribution directly affect the accuracy and precision with which the number of atoms in a particular atom column can be estimated. It is shown that single atom sensitivity is feasible taking the latter aspects into consideration.   
Language 



English
 
Source (journal) 



Ultramicroscopy.  Amsterdam  
Publication 



Amsterdam : 2013
 
ISSN 



03043991
 
Volume/pages 



134(2013), p. 2333
 
ISI 



000324474900005
 
Full text (Publisher's DOI) 


  
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