Publication
Title
Apparent and steady-state etch rates in thin film etching and under-etching of microstructures : 2: characterization
Author
Abstract
Language
English
Source (journal)
Journal of micromechanics and microengineering. - Bristol
Publication
Bristol : 2010
ISSN
0960-1317
Volume/pages
20(2010), p. 1-6
ISI
000277305000034
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
External links
Web of Science
Record
Identification
Creation 25.09.2013
Last edited 27.11.2018