Title
In-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGe
Author
Faculty/Department
Faculty of Applied Engineering Sciences
Publication type
doctoralThesis
Publication
Hasselt :Universiteit Hasselt, [*]
Subject
Engineering sciences. Technology
Volume/pages
228 p.,
Carrier
E
Target language
English (eng)