Publication
Title
In-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGe
Author
Language
English
Publication
Hasselt : Universiteit Hasselt, 2011
Volume/pages
228 p.
UAntwerpen
Faculty/Department
Publication type
Subject
Record
Identification
Creation 25.09.2013
Last edited 02.09.2016