Publication
Title
An analysis of beamdeflections in Poly-SiGecantilevers
Author
Language
English
Source (book)
Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Microelectronics and Microsystems : EURoSimE 2006, Grand Hotel Di Como, Como, Italy, April 24-25-26, 2006 / Ernst, L.J. [edit.]
Publication
IEEE, 2006
ISBN
9781424402755
Volume/pages
p. 441-446
UAntwerpen
Faculty/Department
Publication type
Subject
External links
Record
Identification
Creation 29.10.2013
Last edited 02.09.2016