Publication
Title
An analysis of beamdeflections in Poly-SiGecantilevers
Author
Language
English
Source (book)
Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Microelectronics and Microsystems : EURoSimE 2006, Grand Hotel Di Como, Como, Italy, April 24-25-26, 2006 / Ernst, L.J. [edit.]
Publication
IEEE , 2006
ISBN
9781424402755
Volume/pages
p. 441-446
UAntwerpen
Faculty/Department
Publication type
Subject
External links
Record
Identifier
Creation 29.10.2013
Last edited 22.08.2023
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