Title
An analysis of beamdeflections in Poly-SiGecantilevers An analysis of beamdeflections in Poly-SiGecantilevers
Author
Faculty/Department
Faculty of Applied Engineering Sciences
Publication type
conferenceObject
Publication
IEEE, [*]
Subject
Engineering sciences. Technology
Source (book)
Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Microelectronics and Microsystems : EURoSimE 2006, Grand Hotel Di Como, Como, Italy, April 24-25-26, 2006 / Ernst, L.J. [edit.]
ISBN - Hoofdstuk
9781424402755
Carrier
E
Target language
English (eng)