Publication
Title
Investigation of intrinsic stress effects in cantilever structures
Author
Language
English
Source (book)
Proceedings of the 2nd Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand, Jan. 16-19, 2007
Publication
Piscataway, N.J. : IEEE, 2007
Volume/pages
p. 151-154
Number
978-1-4244-0609-8
UAntwerpen
Faculty/Department
Publication type
Subject
External links
Record
Identification
Creation 29.10.2013
Last edited 02.09.2016