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Title
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Investigation of intrinsic stress effects in cantilever structures
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Author
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Language
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English
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Source (book)
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Proceedings of the 2nd Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand, Jan. 16-19, 2007
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Publication
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Piscataway, N.J.
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IEEE
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2007
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ISBN
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978-1-4244-0609-8
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Volume/pages
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p. 151-154
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