Title
Investigation of intrinsic stress effects in cantilever structures
Author
Faculty/Department
Faculty of Applied Engineering Sciences
Publication type
conferenceObject
Publication
Piscataway, N.J. :IEEE, [*]
Subject
Engineering sciences. Technology
Source (book)
Proceedings of the 2nd Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand, Jan. 16-19, 2007
ISBN
978-1-4244-0609-8
Carrier
E
Target language
English (eng)