Publication
Title
Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
Author
Language
English
Source (book)
Materials for advanced metallization : MAM 2007, March 4-7, 2007, Brugge, Belgium
Publication
2007
UAntwerpen
Faculty/Department
Publication type
Subject
Record
Identification
Creation 29.10.2013
Last edited 02.09.2016