Title
Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
Author
Faculty/Department
Faculty of Applied Engineering Sciences
Publication type
conferenceObject
Publication
[*]
Subject
Engineering sciences. Technology
Source (book)
Materials for advanced metallization : MAM 2007, March 4-7, 2007, Brugge, Belgium
Carrier
E
Target language
English (eng)