Title
The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions
Author
Faculty/Department
Faculty of Applied Engineering Sciences
Publication type
conferenceObject
Publication
[*]
Subject
Engineering sciences. Technology
Source (book)
NanoSMat 2007 : International Conference on Surfaces, Coatings and Nanostructured Materials, 9-11 July 2007, Hotel Pestana Alvor Praia, Algarve, Portugal
Carrier
E
Target language
English (eng)