The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions

Publication

Title				The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions

Author				Van Barel, G. Witvrouw, A.

Language				English

Source (book)				NanoSMat 2007 : International Conference on Surfaces, Coatings and Nanostructured Materials, 9-11 July 2007, Hotel Pestana Alvor Praia, Algarve, Portugal

Publication				2007

Volume/pages

UAntwerpen

Faculty/Department				Faculty of Applied Engineering Sciences

Publication type				P3 Proceeding

Subject				Engineering sciences. Technology

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Creation

29.10.2013

Last edited

22.08.2023

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