Publication
Title
The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions
Author
Language
English
Source (book)
NanoSMat 2007 : International Conference on Surfaces, Coatings and Nanostructured Materials, 9-11 July 2007, Hotel Pestana Alvor Praia, Algarve, Portugal
Publication
2007
Volume/pages
UAntwerpen
Faculty/Department
Publication type
Subject
Record
Identification
Creation 29.10.2013
Last edited 02.09.2016