Title
Stacked boron doped poly-crystalline silicon-germanium : an excellent MEMS structural layer
Author
Faculty/Department
Faculty of Applied Engineering Sciences
Publication type
conferenceObject
Publication
[*]
Subject
Engineering sciences. Technology
Source (book)
Passive and electromechanical materials and integration : proceedings of a meeting held 24-28 March 2008, San Francisco, California
Source (series)
Materials Research Society Symposium Proceedings ; 1075
ISBN - Hoofdstuk
978-1-60560-857-0
Carrier
E
Target language
English (eng)