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Title
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Stacked boron doped poly-crystalline silicon-germanium : an excellent MEMS structural layer
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Author
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Language
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English
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Source (book)
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Passive and electromechanical materials and integration : proceedings of a meeting held 24-28 March 2008, San Francisco, California
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Source (series)
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Materials Research Society Symposium Proceedings ; 1075
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Publication
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2008
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ISBN
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978-1-60560-857-0
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