Publication
Title
Stacked boron doped poly-crystalline silicon-germanium : an excellent MEMS structural layer
Author
Language
English
Source (book)
Passive and electromechanical materials and integration : proceedings of a meeting held 24-28 March 2008, San Francisco, California
Source (series)
Materials Research Society Symposium Proceedings ; 1075
Publication
2008
ISBN
978-1-60560-857-0
UAntwerpen
Faculty/Department
Publication type
Subject
External links
Record
Identification
Creation 31.10.2013
Last edited 02.09.2016