A simple absorption correction for electron probe X-ray microanalysis of bulk samples
Faculty of Sciences. Chemistry
X-ray spectrometry. - London
, p. 115-119
University of Antwerp
A simple procedure is proposed for the calculation of the absorption correction factor in electron-probe x-ray microanalysis. It is based on the concept of an effective depth of x-ray production, assuming a rectangular depth distribution function for x-ray generation. This effective x-ray production depth is expressed as a fraction of the x-ray excitation depth given by Whelan's expression. Adequate values for this fraction are presented. Two versions are considered. In the first the effective x-ray production is a function of both the characteristic x-ray energy and the atomic numbers of the matrix elements, whereas in the second one, which is indicated for routine use, the energy dependence is neglected. Calculations pointed to satisfactory results, even for low x-ray energies and high overvoltages.