Method for testing MEMS devices : EP 2202197

Publication

Title				Method for testing MEMS devices : EP 2202197

Author				Van Barel, Gregory

Language				English

Publication				2009

Note				Patent: EP 2202197

UAntwerpen

Faculty/Department				Faculty of Applied Engineering Sciences

Publication type				Patent

Subject				Engineering sciences. Technology

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Creation

02.04.2014

Last edited

22.08.2023

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