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Title
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Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled discharge
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Author
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Abstract
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| Computer simulations based on the particle-in-cell/Monte Carlo collision method are performed to study the plasma characteristics and especially the transition in electron heating mechanisms in a hybrid direct current (dc)/dual-frequency (DF) capacitively coupled CF 4 discharge. When applying a superposed dc voltage, the plasma density first increases, then decreases, and finally increases again, which is in good agreement with experiments. This trend can be explained by the transition between the four main heating modes, i.e., DF coupling, dc and DF coupling, dc source dominant heating, and secondary electron dominant heating. |
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Language
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English
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Source (journal)
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Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
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Publication
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New York, N.Y.
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American Institute of Physics
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2014
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ISSN
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0021-8979
[print]
1089-7550
[online]
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DOI
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10.1063/1.4882297
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Volume/pages
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115
:22
(2014)
, p. 1-6
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Article Reference
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223302
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ISI
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000337891800006
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Medium
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E-only publicatie
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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