Publication
Title
Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled discharge
Author
Abstract
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 2014
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
115:22(2014), p. 1-6
Article Reference
223302
ISI
000337891800006
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 17.06.2014
Last edited 15.05.2018
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