Title
Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled <tex>$CF_{4}$</tex> discharge Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled <tex>$CF_{4}$</tex> discharge
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
New York, N.Y. :American Institute of Physics ,
Subject
Physics
Chemistry
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Volume/pages
115(2014) :22 , p. 1-6
ISSN
0021-8979
1089-7550
Article Reference
223302
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
Computer simulations based on the particle-in-cell/Monte Carlo collision method are performed to study the plasma characteristics and especially the transition in electron heating mechanisms in a hybrid direct current (dc)/dual-frequency (DF) capacitively coupled CF 4 discharge. When applying a superposed dc voltage, the plasma density first increases, then decreases, and finally increases again, which is in good agreement with experiments. This trend can be explained by the transition between the four main heating modes, i.e., DF coupling, dc and DF coupling, dc source dominant heating, and secondary electron dominant heating.
E-info
https://repository.uantwerpen.be/docman/iruaauth/17069b/52ee86ee1a9.pdf
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